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Title of the item:

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

Title:
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Authors:
Meinel, Katja (AUTHOR)
Melzer, Marcel (AUTHOR)
Stoeckel, Chris (AUTHOR)
Shaporin, Alexey (AUTHOR)
Forke, Roman (AUTHOR)
Zimmermann, Sven (AUTHOR)
Hiller, Karla (AUTHOR)
Otto, Thomas (AUTHOR)
Kuhn, Harald (AUTHOR)
Source:
Sensors (14248220). Nov2020, Vol. 20 Issue 22, p6599. 1p.
Academic Journal
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