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Tytuł:
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Amorphous lanthanum lutetium oxide thin films as an alternative high-κ gate dielectric.
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Autorzy:
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Lopes, J. M. J.
Roeckerath, M.
Heeg, T.
Rije, E.
Schubert, J.
Mantl, S.
Afanas'ev, V. V.
Shamuilia, S.
Stesmans, A.
Jia, Y.
Schlom, D. G.
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Temat:
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THIN films
AMORPHOUS semiconductors
SILICON
PULSED laser deposition
ATOMIC force microscopy
X-ray diffraction
PHOTOEMISSION
PHOTOCONDUCTIVITY
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Źródło:
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Applied Physics Letters; 11/27/2006, Vol. 89 Issue 22, p222902, 3p, 4 Graphs
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Lanthanum lutetium oxide thin films were grown on (100) Si by pulsed laser deposition. Rutherford backscattering spectrometry, atomic force microscopy, x-ray diffraction, and x-ray reflectometry were employed to investigate the samples. The results indicate the growth of stoichiometric and smooth LaLuO3 films that remain amorphous up to 1000 °C. Internal photoemission and photoconductivity measurements show a band gap width of 5.2±0.1 eV and symmetrical conduction and valence band offsets of 2.1 eV. Capacitance and leakage current measurements reveal C-V curves with a small hysteresis, a dielectric constant of ≈32, and low leakage current density levels. [ABSTRACT FROM AUTHOR]
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