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Title of the item:

Design and verification of a structure for isolating stress in sandwich MEMS accelerometer

Title :
Design and verification of a structure for isolating stress in sandwich MEMS accelerometer
Authors :
Mo, Yuming
Yang, Jie
Peng, Bo
Xie, Guofen
Tang, Bin
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Source :
Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems. :1-8
Academic Journal

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