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Title of the item:

Formation of Multilayer Structures with Integrated Membranes Based on Porous Silicon

Title:
Formation of Multilayer Structures with Integrated Membranes Based on Porous Silicon
Authors:
Bolotov, V. V.
Ivlev, K. E.
Knyazev, E. V.
Ponomareva, I. V.
Roslikov, V. E.
Source:
Semiconductors. 54(5):609-613
Academic Journal
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