- Tytuł :
- Capacitive micromachined ultrasonic transducer with driving voltage over 100 V and vibration durability over 1011 cycles.
- Autorzy :
- Źródło :
- TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p2218-2221, 4p
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Konferencja