- Tytuł:
- Downsizing and Silicon Integration of Photoacoustic Gas Cells.
- Autorzy:
- Temat:
-
PRESSURE sensors
TRACE gases
SILICON
CELLS
DETECTION limit
PHOTOACOUSTIC spectroscopy
MICROELECTROMECHANICAL systems - Źródło:
- International Journal of Thermophysics; Feb2020, Vol. 41 Issue 2, p1-18, 18p
Czasopismo naukowe