Autor: "Forke, Roman" - OpacWWW

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Tytuł:: 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Autorzy:: Meinel K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Melzer M; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Stoeckel C; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Shaporin A; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Forke R; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Zimmermann S; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Hiller K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Otto T; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Kuhn H; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.; Pokaż więcej
Źródło:: Sensors (Basel, Switzerland) [Sensors (Basel)] 2020 Nov 18; Vol. 20 (22). Date of Electronic Publication: 2020 Nov 18.
Typ publikacji:: Journal Article

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