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You search for a phrase ""Groeseneken, G."" according to the criterion: All Text


Title:
Scaled X-bar TiN/HfO2/TiN RRAM cells processed with optimized plasma enhanced atomic layer deposition (PEALD) for TiN electrode
Authors:
Chen, Y.Y.
Goux, L.
Pantisano, L.
Swerts, J.
Adelmann, C.
Mertens, S.
Afanasiev, V.V.
Wang, X.P.
Govoreanu, B.
Degraeve, R.
Kubicek, S.
Paraschiv, V.
Verbrugge, B.
Jossart, N.
Altimime, L.
Jurczak, M.
Kittl, J.
Groeseneken, G.
Wouters, D.J.
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Source:
In Microelectronic Engineering December 2013 112:92-96
Academic Journal

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