- Tytuł:
- Optimization of the process parameters for the AlN crystal growth in the PVT method through an improved numerical simulation considering partial pressure of gas phases.
- Autorzy:
- Temat:
-
PARTIAL pressure
CRYSTAL growth
TEMPERATURE distribution
MASS transfer
ALUMINUM nitride
HEAT sinks - Źródło:
- CrystEngComm; 2/21/2024, Vol. 26 Issue 7, p965-976, 12p
Czasopismo naukowe