- Tytuł :
- Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.
- Autorzy :
- Temat :
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MICROMIRRORS
ALUMINUM nitride
PIEZOELECTRIC transducers
PIEZOELECTRIC materials
ELECTRIC fields
HIGH voltages
DEFLECTION (Mechanics) - Źródło :
- Micromachines; Apr2022, Vol. 13 Issue 4, pN.PAG-N.PAG, 13p
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Czasopismo naukowe