- Tytuł:
- Integration of (Poly‐Si/Air) Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process.
- Autorzy:
- Źródło:
- IEEJ Transactions on Electrical & Electronic Engineering. May2024, Vol. 19 Issue 5, p767-772. 6p.
Czasopismo naukowe