- Tytuł:
- The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering.
- Autorzy:
- Temat:
-
ANNEALING of metals
MAGNETRON sputtering
THIN films
SCANNING probe microscopy
FOURIER transform infrared spectroscopy
RUTHERFORD backscattering spectrometry
ALUMINUM nitride
ALUMINUM nitride films - Źródło:
-
Physica Status Solidi (B) ; May2020, Vol. 257 Issue 5, p1-9, 9p
Czasopismo naukowe