- Tytuł:
-
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. - Autorzy:
- Źródło:
- Sensors (14248220). Nov2020, Vol. 20 Issue 22, p6599. 1p.
Czasopismo naukowe