- Tytuł:
- Integration of (Poly‐Si/Air) Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process.
- Autorzy:
- Źródło:
- IEEJ Transactions on Electrical & Electronic Engineering; May2024, Vol. 19 Issue 5, p767-772, 6p
Czasopismo naukowe