- Tytuł:
- 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
- Autorzy:
- Temat:
-
ALUMINUM nitride films
PIEZOELECTRIC thin films
PIEZOELECTRIC detectors
MICROMIRROR devices
FLUORESCENCE microscopy - Źródło:
-
Sensors (14248220) ; Nov2020, Vol. 20 Issue 22, p6599, 1p
Czasopismo naukowe