- Tytuł:
- Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications.
- Autorzy:
- Temat:
-
MICROELECTROMECHANICAL systems
FABRICATION (Manufacturing)
OPTICAL properties
FABRY-Perot interferometers
PLASMONICS
PASSIVATION - Źródło:
- Micro (2673-8023); Mar2024, Vol. 4 Issue 1, p142-156, 15p
Czasopismo naukowe