- Tytuł:
- Highly Miniaturized MEMS‐Based Test Platforms for Thermo‐Mechanical and Reliability Characterization of Nano‐Functional Elements − Technology and Functional Test Results
- Autorzy:
- Źródło:
- Physica Status Solidi (A) - Applications and Materials Science; October 2019, Vol. 216 Issue: 19
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