- Tytuł:
- Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater.
- Autorzy:
- Temat:
-
MICROELECTROMECHANICAL systems
ELECTRICAL engineering materials
ACTUATORS
ELECTROMECHANICAL devices
ACTUATOR manufacturing - Źródło:
- Microsystem Technologies; Jun2014, Vol. 20 Issue 6, p1041-1050, 10p
Czasopismo naukowe