- Tytuł:
- Integration of (Poly‐Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process.
- Autorzy:
- Źródło:
- IEEJ Transactions on Electrical & Electronic Engineering. Dec2023, p1. 6p. 20 Illustrations, 2 Charts.
Czasopismo naukowe