- Tytuł:
- 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
- Autorzy:
- Źródło:
-
Sensors (14248220) . Nov2020, Vol. 20 Issue 22, p6599. 1p.
Czasopismo naukowe