Autor: "Hiller, Karla" - OpacWWW

Skocz do pozycji: 1 1.

Tytuł :: Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.
Autorzy :: Stoeckel C; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Meinel K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Melzer M; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Žukauskaitė A; Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01277 Dresden, Germany.
Zimmermann S; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Forke R; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Hiller K; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Kuhn H; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Pokaż więcej
Źródło :: Micromachines [Micromachines (Basel)] 2022 Apr 15; Vol. 13 (4). Date of Electronic Publication: 2022 Apr 15.
Typ publikacji :: Journal Article
: Czasopismo naukowe

Szczegóły

Skocz do pozycji: 2 2.

Tytuł :: 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Autorzy :: Meinel K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Melzer M; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.
Stoeckel C; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Shaporin A; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Forke R; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Zimmermann S; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Hiller K; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Otto T; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.
Kuhn H; Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany.; Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany.; Pokaż więcej
Źródło :: Sensors (Basel, Switzerland) [Sensors (Basel)] 2020 Nov 18; Vol. 20 (22). Date of Electronic Publication: 2020 Nov 18.
Typ publikacji :: Journal Article
: Czasopismo naukowe

Szczegóły Pełny tekst Pełny tekst

Skocz do pozycji: 3 3.

Tytuł :: Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform.
Autorzy :: Li Z; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany. .
Gao S; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany. .
Brand U; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany. .
Hiller K; Fakultät für Elektrotechnik und Informationstechnik, Zentrum für Mikrotechnologien Chemnitz, Technische Universität Chemnitz, Reichenhainer Straße 70, 09126 Chemnitz, Germany. karla.hiller@zfm.tu-chemnitz.de.
Hahn S; Fakultät für Elektrotechnik und Informationstechnik, Zentrum für Mikrotechnologien Chemnitz, Technische Universität Chemnitz, Reichenhainer Straße 70, 09126 Chemnitz, Germany. .
Hamdana G; Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany. .
Peiner E; Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany. .
Wolff H; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany. .
Bergmann D; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany. .; Pokaż więcej
Źródło :: Sensors (Basel, Switzerland) [Sensors (Basel)] 2019 Oct 18; Vol. 19 (20). Date of Electronic Publication: 2019 Oct 18.
Typ publikacji :: Journal Article
: Czasopismo naukowe

Szczegóły Pełny tekst Pełny tekst

Skocz do pozycji: 4 4.

Tytuł :: Light-induced magnetoresistance in solution-processed planar hybrid devices measured under ambient conditions.
Autorzy :: Banerjee S; Semiconductor Physics, Technische Universität Chemnitz, Germany.; Center for Microtechnologies, Technische Universität Chemnitz, Germany.
Bülz D; Semiconductor Physics, Technische Universität Chemnitz, Germany.
Reuter D; Center for Microtechnologies, Technische Universität Chemnitz, Germany.; Fraunhofer ENAS, Chemnitz, Germany.
Hiller K; Center for Microtechnologies, Technische Universität Chemnitz, Germany.
Zahn DRT; Semiconductor Physics, Technische Universität Chemnitz, Germany.
Salvan G; Semiconductor Physics, Technische Universität Chemnitz, Germany.; Pokaż więcej
Źródło :: Beilstein journal of nanotechnology [Beilstein J Nanotechnol] 2017 Jul 21; Vol. 8, pp. 1502-1507. Date of Electronic Publication: 2017 Jul 21 (Print Publication: 2017).
Typ publikacji :: Journal Article
: Czasopismo naukowe

Szczegóły

Skocz do pozycji: 5 5.

Tytuł :: HED-TIE: A wafer-scale approach for fabricating hybrid electronic devices with trench isolated electrodes.
Autorzy :: Banerjee S; Institute of Physics, Technische Universität Chemnitz, Germany. Center for Microtechnologies, Technische Universität Chemnitz, Germany.
Bülz D
Solonenko D
Reuter D
Deibel C
Hiller K
Zahn DRT
Salvan G; Pokaż więcej
Źródło :: Nanotechnology [Nanotechnology] 2017 May 12; Vol. 28 (19), pp. 195303. Date of Electronic Publication: 2017 Mar 15.
Typ publikacji :: Journal Article
: Czasopismo naukowe

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