- Tytuł :
- Large-scale fabrication of LP-CVD Si3N4photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers
- Autorzy :
- Źródło :
- Proceedings of SPIE; August 2017, Vol. 10354 Issue: 1 p1035403-1035403-11
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Periodyk