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You search for a phrase ""Hiller, Karla"" according to the criterion: Author

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    Showing 1-13 from 13 results
    Title:
    Integration of (Poly‐Si/Air) Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process.
    Authors:
    Helke, Christian (AUTHOR)
    Seiler, Jan (AUTHOR)
    Meinig, Marco (AUTHOR)
    Großmann, Toni Dirk (AUTHOR)
    Bonitz, Jens (AUTHOR)
    Haase, Micha (AUTHOR)
    Zimmermann, Sven (AUTHOR)
    Ebermann, Martin (AUTHOR)
    Kurth, Steffen (AUTHOR)
    Reuter, Danny (AUTHOR)
    Hiller, Karla (AUTHOR)
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    Source:
    IEEJ Transactions on Electrical & Electronic Engineering. May2024, Vol. 19 Issue 5, p767-772. 6p.
    Academic Journal
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    Title:
    2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
    Authors:
    Meinel, Katja (AUTHOR)
    Melzer, Marcel (AUTHOR)
    Stoeckel, Chris (AUTHOR)
    Shaporin, Alexey (AUTHOR)
    Forke, Roman (AUTHOR)
    Zimmermann, Sven (AUTHOR) karla.hiller@zfm.tu-chemnitz.de
    Hiller, Karla (AUTHOR)
    Otto, Thomas (AUTHOR)
    Kuhn, Harald (AUTHOR)
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    Source:
    Sensors (14248220). Nov2020, Vol. 20 Issue 22, p6599. 1p.
    Academic Journal
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    Title:
    Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform.
    Authors:
    Li, Zhi (AUTHOR)
    Gao, Sai (AUTHOR)
    Brand, Uwe (AUTHOR)
    Hiller, Karla (AUTHOR) karla.hiller@zfm.tu-chemnitz.de
    Hahn, Susann (AUTHOR)
    Hamdana, Gerry (AUTHOR)
    Peiner, Erwin (AUTHOR)
    Wolff, Helmut (AUTHOR)
    Bergmann, Detlef (AUTHOR)
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    Source:
    Sensors (14248220). Oct2019, Vol. 19 Issue 20, p4529. 1p.
    Academic Journal
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    Title:
    Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components.
    Authors:
    Freitag, Markus (AUTHOR)
    Sauppe, Matthias (AUTHOR)
    Auerswald, Christian (AUTHOR)
    Kriebel, David (AUTHOR)
    Schmidt, Henry (AUTHOR)
    Voigt, Sebastian (AUTHOR)
    Arnold, Benjamin (AUTHOR)
    Markert, Erik (AUTHOR)
    Hahn, Susann (AUTHOR)
    Hiller, Karla (AUTHOR)
    Heinkel, Ulrich (AUTHOR)
    Mehner, Jan (AUTHOR)
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    Source:
    Physica Status Solidi. A: Applications & Materials Science. Oct2019, Vol. 216 Issue 19, pN.PAG-N.PAG. 1p.
    Academic Journal
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      Showing 1-13 from 13 results

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