- Title:
- Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression
- Authors:
- Subject Terms:
-
SAW devices
comprehensive analysis
multi-layered structure
transverse mode suppression
Mechanical engineering and machinery
TJ1-1570 - Source:
- Micromachines, Vol 15, Iss 1, p 12 (2023)
- File Description:
- electronic resource
- Relation:
- https://www.mdpi.com/2072-666X/15/1/12; https://doaj.org/toc/2072-666X
- Access URL:
- https://doaj.org/article/a2ded562d3ff44c1ab7cca54b71d881b  Link opens in a new window
Academic Journal