- Title:
-
Reduction of Misfit Dislocation Density in Metamorphic
Heterostructures by Design Optimization of the Buffer Layer with Non-Linear Graded Composition Profile. - Authors:
- Subject Terms:
-
BUFFER layers
DISLOCATION density
MODULATION-doped field-effect transistorsHETEROSTRUCTURES
RESIDUAL stresses
TRANSMISSION electron microscopy
ELECTRON density - Source:
- Semiconductors; Mar2023, Vol. 57 Issue 3, p153-159, 7p
Academic Journal