- Tytuł:
- Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators.
- Autorzy:
- Temat:
-
ALUMINUM nitride
MEMS resonators
QUALITY factor
PRESSURE sensorsNITRIDES
RESONATORS - Źródło:
- Nanotechnology & Precision Engineering; Mar2024, Vol. 7 Issue 1, p1-12, 12p
Czasopismo naukowe