- Tytuł :
- Materials meeting electronic requirements for Sub-10 nm lithography
- Autorzy :
- Temat :
-
[PHYS]Physics [physics]
ComputingMilieux_MISCELLANEOUS - Źródło :
-
Directed Self-Assembly Symposium – DSA 2017
Directed Self-Assembly Symposium – DSA 2017, Oct 2017, Chicago (USA), United States - Dostępność :
-
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::4df10f5961832eb637ca82b8033c5724
https://hal.univ-grenoble-alpes.fr/hal-01930180