- Tytuł :
- A loss mechanism study of a very high Q silicon micromechanical oscillator.
- Autorzy :
- Temat :
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MICROELECTROMECHANICAL systems
THIN films
SOLID state electronics
THERMOELASTICITY
CONTINUUM mechanics
LASERS - Źródło :
- Journal of Applied Physics; 1/15/2005, Vol. 97 Issue 2, p023524, 6p, 2 Diagrams, 1 Chart, 3 Graphs
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Czasopismo naukowe