- Tytuł:
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Thermal oxidation mechanism and stress evolution in Ta thin films. - Autorzy:
- Temat:
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THERMAL oxidation (Materials science )
ACTIVATION energy
HEATINGOXIDATION
TANTALUM oxide - Źródło:
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Journal of
Materials Research; Jun2010, Vol. 25 Issue 6, p1080-1086, 7p
Czasopismo naukowe