- Tytuł:
- Low-Temperature Relaxation of Elastic Stresses in SiGe/Si Heterostructures Irradiated with Ge[sup +] Ions.
- Autorzy:
- Temat:
-
HETEROSTRUCTURES
MOLECULAR beamepitaxy EPITAXY
IONS
SILICON
PHYSICAL sciences - Źródło:
- Semiconductors; Mar2004, Vol. 38 Issue 3, p313-318, 6p
Czasopismo naukowe